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*Research projects [#y4694e7c] -''Simulation''~ ~ ''Simulation of polymer resist for MEMS''~ The mechanical property of the polymer resist is required for development of MEMS microfluidic device. We predict by coarse grained molecular dynamics simulation. ~ ~ http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/theme1-1.jpg http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/theme1-2.jpg http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/theme1-3.jpg ~ ~ [1] H. Yagyu, Y. Hirai, A. Uesugi, Y. Makino, K. Sugano, T. Tsuchiya, O. Tabata: Polymer, Vol.53, p.4834-4842 (2012).~ [2] 平井義和, 柳生裕聖, 牧野圭秀, 上杉晃生, 菅野公二, 土屋智由, 田畑修: 電気学会論文誌E（センサ･マイクロマシン部門誌）, Vol.133 No.9, p.320-329 (2013).~ ~ ~ ''Simulation of rubber materials''~ A polymer chain is treated as a simple beads-spring model, and the viscoelastic and elongation behavier of the model is simulated using molecular dynamics calculation software such as OCTA/COGNAC and LAMMPS with supercomputer according to the model scale.~ ~ http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/theme2-1.jpg http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/theme2-2.jpg http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/theme2-3.jpg ~ ~ [1] H. Yagyu, T. Utsumi: Computational Materials Science, Vol.46 Issue 2, p.286-292 (2009).~ [2] 柳生裕聖: 日本機械学会論文集（計算力学）, Vol.80 No.810, p.CM0032 (2014).~ ~ ~ ''Simulation of micropowder btasting''~ We predict processed shape on a glass substrate by powder btasting using cellular automaton method. The simulator is improved by comparison of experimental result and simulated result, in addition of the production of processing system.~ ~ http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/theme3-1.jpg http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/theme3-2.jpg http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/theme3-3.jpg ~ ~ ~ [1] H. Yagyu, O. Tabata: Journal of Micromechanics and Microengineering, Vol.18 No. 5, 055010(9pp) (2009).~ [2] H. Yagyu, O. Tabata: Transaction on Electrical and Electronic Engineering, Vol.2 No. 3, p.348-356 (2007). ~ ~ ~ -''Experiment''~ ~ ''Laser microfabrication process''~ laser microfabrication of goid nanoparticles dispersed polymer film is prposed. Since wave length of laser beam is selected an absorption wavelength by plasmon resonance vibration of gold nanoparticles, the polymer film can be micromachined. In this study, we focus the effect of size and distribution of naoparticle on laser processed shape. ~ ~ http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/galvano.png http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/tem.png http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/kangaku.png ~ ~ ~ [1] H. Yagyu, O. Tabata: Applied Surface Science, Vol.255 No. 5 Part 1, p.2237-2243 (2008).~ [2] T. Kikitsu, Y. Yagoto, M. Ogawa, H. Yagyu: The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2015), Anchorage (June, 2015), accepted. ~ ~ ''Microfluidic device''~ A glass microfluidic device with mcirochannel is fabricated by micropowder blasting, and the prepareation of metalic nanoparticles on the produced device is prposed. In this study, we focus the production of device which can synthesize nanoparticles by liquid-phase reduction method. ~ http://home.kanto-gakuin.ac.jp/~yagyu/yagmasa/image/4-1.png ~ ~ ~ [1] 濱村心, 森塚大樹, 柳生裕聖: 日本機械学会 第6回マイクロ･ナノ工学シンポジウム講演論文集, 松江（2014年10月）, 20pm3-PM021.
