*Facility [#xd12d769] [Fabrication system,experimental equipment]~ -[[Micropowder blasting>マイクロブラスト加工装置]]~ ~ -[[Galvano laser scan system>ガルバノレーザースキャンシステム]]~ ~ -[[Electric muffle furnance>マッフル炉]] : Yamato Scientific FO-310~ ~ -[[Mask aligner>マスクアライナ]] : Canon PLA-501S~ ~ -[[Spray developer>スプレー現像装置]]~ ~ -[[Spin coater>スピンコータ]] : Oshigane SC-200~ ~ -[[Ion sputtering system>イオンスパッタ装置]] : JEOL JFC-1500~ ~ -[[Reactive Ion Etching>ドライエッチング装置(RIE)]] : ANELVA DEM-451~ ~ -[[Vacuum vapor deposition system>蒸着装置]]: JEOL JEE-400~ ~ -Polisher~ ~ -Router~ ~ -[[Draft chamber>簡易ドラフトチャンバ]]:N2FACTORY NGDS-2~ ~ -[[Draft chamber>簡易ドラフトチャンバ]]~ ~ -Aspirator~ ~ -Hotplate stirrer~ ~ -Hotplate~ ~ -Electric balance~ ~ -[[Photolithography Room>フォトリソグラフィ加工室]]~ ~ -Ultrasonic cleaner~ ~ -[[3D printer>3Dプリンタ]]: Micro M3D~ ~ -Deionized Water Production Unit: SHIBATA PURE PORT P-101~ ~ -Dry cabinet:SANPLATEC DGK-220C-A~ ~ [Analytical instruments]~ -[[Scanning Electron Microscope>卓上走査型電子顕微鏡]] : Shimadzu Rika Corporation e-SEM~ ~ -[[Spectrophotometer>分光光度計]] : Shimadzu Corporation UVmini-1240~ ~ -Microscope~ ~ -[[Confocal laser scanning microscope>超深度形状測定顕微鏡]] : Keyence VK-8500~ ~ -[[Dynamic Light-Scattering Particle Size Analyzer>動的光散乱式粒子径測定装置]] : Horiba SZ-100S~ ~ -Surface roughness measuring instrument : Tokyo seimitsu Surfcom480A~ ~ -Transmission Electron Microscope : Hitachi HT7800~ ~ [Computing cluster, Software]~ -[[Parallel computer>並列計算機]](Linux CentOS6.3) : Dell T5600 4 units~ ~ -Analytical PC(Windows7) : 3 units~ ~ -Analytical PC(Windows8) : 4 units~ ~