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| MEMS(Micro Electro Mechanical Systems) which is a technology realizing chemical analysis system and medical device with small and high quality, was achieved by microfabrication of silicon and polymeric material. Since material characteristics in nano-micro space is important in this fabrication process, computer simulation of meterials and fabrication process focusing molecular scale. In addition, a new fabrication process using nanomaterials is reserched in our laboratory. In the research of simulation, the prediction of properties of polymer resist and rubber material, and simulation of laser processing and micropowder blasting is researched using a supercomputer according to the calculation scale. Moreover, development of a novel fabrication process and materials using the simulation results about technical information and optical property of materials are carried out. We focus the characteristics of MEMS materials such as polymer resist in meso scale, and an aplication of developed materials to microsystem is pursued. |  |  |
