マイクロブラスト加工の加工特性評価 †

　マイクロブラスト加工は、マイクロサイズのセラミクス製の投射材をマスク付き基板に投射することにより、高アスペクト比の微細な溝や穴加工が可能である．しかし，加工中にマスク材が摩耗するため、加工形状はマスク材の耐摩耗性に依存する．本研究室では耐摩耗性の優れたマスク材やマスク材の温度制御による加工形状の制御を検討している．

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